on 14 Oct 2022
Last Applicant/ Owned by
Oxford Instruments Nanotechnology Tools Limited
Tubney Woods, Abingdon, Oxon
, , OX13 5QX
Serial Number
UK00003839041 filed on 14th Oct 2022
Registration Number
UK00003839041 registered on
6th Jan 2023
Correspondent Information
Gill Jennings & Every LLP
The Broadgate Tower, 20 Primrose Street
London,
EC2A 2ES
Vapor deposition machines; plasma deposition and thermal growth machines; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; flexible plasma processing apparatus for plasma etching and plasma deposition.
Apparatus and instruments in the field of plasma deposition and thermal growth; apparatus and instruments for handling and plasma treatment of semiconductor wafers, plastics or other materials; plasma cluster tools, all being laboratory apparatus and instruments; plasma research apparatus and instruments; computer hardware and software for use therewith; parts and fittings for the aforesaid goods.
UK00003839041
Word
Individual