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extreme lithography

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Removed

on 9 Mar 2001

Last Applicant/ Owned by

xlith GmbH

Lichtensteinstr. 12

Ulm, , 89075

Serial Number

UK00902125078 filed on 9th Mar 2001

Registration Number

UK00902125078 registered on
17th Jun 2002

Correspondent Information

WUESTHOFF & WUESTHOFF PATENTANWÄLTE PARTG MBB

Schweigerstr. 2

München,

81541

extreme lithography

software for electron beam writing and process technology, in particular for simulating and optimising high-resolution electron beam writing and nanom Read More

Classification Information

Class [9]
Computer & Software Products & Electrical & Scientific Products

Software for electron beam writing and process technology, in particular for simulating and optimising high-resolution electron beam writing and nanometer process technologies; master substrates for high-resolution and ultra high-resolution replication technologies; reference standards for nanometrology; high-resolution masks and reticles.

Class [42]
Computer & Software Services & Scientific Services

Services in the field of electron beam writing, namely research, development, consultancy and customer-specific exposure of solid state substrates, including Si, GaAs, InP, SiC, GaN and diamond; services in the field of process technology, namely research, development, consultancy and the production of structures in dimensions within the range of 5nm and 250nm; creating of, and technical support for software for electron beam writing and process technology, in particular for simulating and optimising high-resolution electron beam writing and nanometer process technologies.

Mark Details

Serial Number

UK00902125078

Mark Type

Word

Kind of mark

Individual