on 30 Sept 1994
Last Applicant/ Owned by
Karl Süss Vaihingen GmbH
Planckstrasse 9, D-71665 Vaihingen/Enz, Germany
, ,
Serial Number
UK00001586902 filed on 30th Sept 1994
Registration Number
UK00001586902 registered on
21st Jul 1995
Correspondent Information
Murgitroyd & Company
Scotland House, 165-169 Scotland Street
Glasgow,
G5 8PL
Modular lithographic process systems for the treatment, coating, developing, etching, stripping and cleaning of substrates and wafers, substantially consisting of sender and receiver modules, handling appliances, centering modules, process modules, metering appliances, steppers, interfaced modules, buffer stations and environmental (clean room) chambers; all included in Class 7.
UK00001586902
Word
Individual