on 30 Oct 1998
Last Applicant/ Owned by
STEAG MicroTech GmbH
Carl-Benz-Strasse 10, 72124 Pliezhausen, Germany
, ,
Serial Number
UK00002180895 filed on 30th Oct 1998
Registration Number
UK00002180895 registered on
21st May 1999
Correspondent Information
Dr Walther Wolff & Co
Sherwood House,, 5 Bluecoats Avenue
Hertford,
Hertfordshire,
SG14 1PB
Machines, machine tools and apparatus, all for use in the manufacture, processing and treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles; parts and fittings for all the aforesaid goods.
Apparatus for drying treatment and wet treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surfaces thereof; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Installation, maintenance, repair and servicing of machines, machine tools, apparatus and equipment used in manufacture, processing, treatment, drying and wetting of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surfaces thereof.
UK00002180895
Word
Individual