on 6 Oct 1995
Last Applicant/ Owned by
STEAG MicroTech GmbH
Carl-Benz-Strasse 10, 72124 Pliezhausen, Germany
, ,
Serial Number
UK00002040918 filed on 6th Oct 1995
Registration Number
UK00002040918 registered on
27th Sept 1996
Machines, machine tools and apparatus, all for use in the manufacture, processing and treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles; parts and fittings for all the aforesaid goods.
Apparatus for drying treatment and wet treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surface thereof; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Installation, maintenance, repair and servicing of machines, machine tools, apparatus and equipment used in manufacture, processing, treatment, drying and wetting of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surfaces thereof.
UK00002040918
Word
Individual