MEGATECH

Class [9]
Computer & Software Products & Electrical & Scientific Products

Apparatus for vacuum process wafer fabrication, vacuum and plasma process and control apparatus and instruments, power supply apparatus and controllers for plasma processing; capacitance manometers for absolute pressure measurement; mass flow controllers for gas control; automatic throttle valves for pressure control; controllers for plasma etching and deposition, low pressure vapour chemical deposition, metal organic chemical vapour deposition and sputtering; ion beam supply apparatus and sputtering apparatus, low and high frequency supply apparatus; direct current magnetron power supply apparatus, process automation apparatus for vacuum apparatus and processes comprising deposition, etching, metal organic and chemical vapour deposition, microwave power supply apparatus, wave guides for plasma processes; high pressure microwave supply apparatus for diamond deposition; electron cyclotron resonance apparatus for etching; apparatus for producing free radicals; instruments for monochromatic detectors for plasma diagnostics and end point detection; in situ film thickness monitors; ellipsometers and thickness measuring instruments for oxides, nitrides, polysilicon, photo resist and other transparent absorbing films, cassette to cassette and automatic mapping apparatus for the aforesaid ellipsometers and thickness measuring instruments; adhesion testers for quantitative value of film substrate bond strength for thin films and for die attach and surface mounted device attachment testing; stress gauges for measuring stresses in deposited films on silicon or gallium arsenide wafers; wafer transfer apparatus for cassette to quartz boat for furnace loading and unloading and flat finders and cassette unloaders for the aforesaid wafer transfer apparatus; robotic loaders for diffusion furnaces; modular rapid thermal processing apparatus for post implant annealing, single wafer epitaxy, sintering, silicon formation, gas reflow, oxidation and nitridation, cryogenic refrigeration apparatus for replacing liquid nitrogen in high vacuum processes; fast cycle water vapour cryopumps; ion gauge tubes; evaporation apparatus, filaments, boats, crucibles and rods, monitor crystals; leak test units, helium bombing chambers, integrated bombing apparatus, standard calibrated leaks, sniffers and helium probes for the aforesaid leak test units and parts and fittings therefor; all included in Class 9; but not including any such goods being electronic data processing apparatus and fittings therefor or computers, computer programs or materials for the recordal of computer programmes.