REACTAFLO

Class [9]
Computer & Software Products & Electrical & Scientific Products

Process and test apparatus and instruments and electrical and electronic control apparatus and instruments, apparatus for vacuum process wafer fabrication; vacuum and plasma process and control apparatus and instruments, power supply apparatus and controllers for plasma processing; controllers for plasma etchimg and deposition, low pressure vapor chemical deposition, metal organic chemical vapor deposition and sputtering; micro procerssor based computer compatible apparatus for the above; process automation apparatus and instruments for vacuum apparatus and processes comprising deposition, etching and metal organic vapor deposition; all included in Class 9.