SHRINC

Class [9]
Computer & Software Products & Electrical & Scientific Products

Apparatus for projecting images of electronic circuit patterns on silicon wafers used in semiconductor manufacturing; illumination optical apparatus used in semiconductor manufacturing; illumination optical apparatus for improving the resolution and focal depth of images, all for use in semiconductor manufacturing; parts and fittings for all the aforesaid goods; lenses; all included in Class 9; but not including any such goods adapted to make objects or images contract in size.