on 25 Feb 2019
Last Applicant/ Owned by
Oxford Instruments Nanotechnology Tools Limited trading as Oxford Instruments Plasma Technology
Tubney Woods , Abingdon
Oxon, , OX13 5QX
Serial Number
UK00003378265 filed on 25th Feb 2019
Registration Number
UK00003378265 registered on
28th Jun 2019
Correspondent Information
Gill Jennings & Every LLP
The Broadgate Tower, 20 Primrose Street
London,
EC2A 2ES
Apparatus and instruments for thin film processing; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; apparatus and instruments for thin film processing namely, atomic layer deposition tools, etch tools and cluster tools with automated handling; flexible plasma processing apparatus for plasma etching and plasma deposition.
UK00003378265
Word
Individual