on 6 Dec 2018
Last Applicant/ Owned by
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, Massachusetts, 01810
Serial Number
UK00003359040 filed on 6th Dec 2018
Registration Number
UK00003359040 registered on
1st Mar 2019
Correspondent Information
Keltie LLP
No.1 London Bridge
London,
SE1 9BA
Plasma generator for etching, photoresist removal, strip, sputtering, deposition, chemical vapor deposition, ion implantation, ion milling, wafer conditioning, on wafer clean, on wafer preclean, material engineering through assisting plasma, surface preconditioning, and surface preparation.
UK00003359040
Word
Individual