on 16 Aug 2011
Last Applicant/ Owned by
ONTO INNOVATION INC.
16 Jonspin Road, Wilmington
, , MA 01887
Serial Number
UK00801092973 filed on 16th Aug 2011
Registration Number
UK00801092973 registered on
22nd Aug 2012
Correspondent Information
Heather J. Kliebenstein, Merchant & Gould P.C.
P.O. Box 2910 Minneapolis MN 55402-0910
,
Metrology system for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing comprised of an interferometric imaging microscope, an image processing and control computer, load ports for receiving wafers, automated axis drives for loading and positioning the wafer, and a clean air handling unit sold as a unit.
UK00801092973
Word
Individual