on 21 May 2002
Last Applicant/ Owned by
Tokyo Electron Kabushiki Kaisha (Tokyo Electron Limited)
3-1 Akasaka 5-chome, Minato-ku, Tokyo, Japan
, ,
Serial Number
UK00002301118 filed on 21st May 2002
Registration Number
UK00002301118 registered on
20th Dec 2002
Correspondent Information
Stevens, Hewlett & Perkins
1 St Augustine's Place
Bristol,
BS1 4UD
Machines and apparatus for manufacturing semiconductors.
Apparatus for evaluating the electromigration of metallic wiring on the wafer level, reducing the evaluation cost and the time between the beginning of evaluation and the end of analysis.
UK00002301118
Word
Individual